?? radialrxrgeom.m
字號:
function [A,nowafermax,invalidgeom] = radialrxrgeom(nrp,Ro,Rp,Rs,Rw)% radialrxrgeom.m Set up the geometry and relevant quadrature grids% for a radial flow reactor system. Called as%% [A,nowafermax,invalidgeom] = radialrxrgeom(nrp,Ro,Rp,Rs,Rw)%% INPUT PARAMETERS%% nrp : number of quadrature pts over susceptor% Ro : center region radius (m)% Rp : platen radius (m)% Rs : wafer center radial position on platen (m)if nargin < 2 Ro = 10/1000; % mendif nargin < 3% Rp = 225/1000; % m Rp = 200/1000; % mendif nargin < 4% Rs = 112.5/1000; % m Rs = 110/1000; % mendif nargin < 5% Rw = 38.1/1000; % m Rw = 50/1000; % mendif nargin == 0 nrp = 60; endR = quadgrid('cyln',nrp,'R',[Ro,Rp]);RSF = qg2sf(R);%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%% check if geometry is valid; compute max number of wafersinvalidgeom = 0;if Rs < Rw+Ro | Rs > Rp-Rw invalidgeom = 1; warning('invalid geometry')endth = 2*asin(Rw/Rs);nowafermax = floor(2*pi/th);%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%% set up an instance of the radialrxrgeom objectA.param = assocarray({ 'R' R 'RSF' RSF 'nrp' nrp ... 'Rp' Rp 'Rs' Rs 'Rw' Rw 'Ro' Ro });A = class(A,'radialrxrgeom');
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