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Microengineering, MEMS, and Interfacing

  • 資源大小:8853 K
  • 上傳時間: 2020-06-06
  • 上傳用戶:shancjb
  • 資源積分:2 下載積分
  • 標(biāo)      簽: Microengineering Interfacing MEMS and

資 源 簡 介

Microengineering and Microelectromechanical systems (MEMS) have very few
watertight definitions regarding their subjects and technologies. Microengineering
can be described as the techniques, technologies, and practices involved in the
realization of structures and devices with dimensions on the order of micrometers.
MEMS often refer to mechanical devices with dimensions on the order of
micrometers fabricated using techniques originating in the integrated circuit (IC)
industry, with emphasis on silicon-based structures and integrated microelectronic
circuitry. However, the term is now used to refer to a much wider range of
microengineered devices and technologies.

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