The phenomenon of electrostatic Discharge (ESD) has been known for a long time, but
recently a growing interest has been observed in ESD in radio frequency (RF) technology
and ESD issues in RF applications.
Electrostatic Discharge (ESD) phenomena have been known to mankind since the Greek
Empire when Thales of Miletus, one of the Seven Sages of Greece, noticed the attraction of
strands of hay to amber, leading to the coining of the word “electron.” Electrical Discharge
and the guiding of electrical Discharge (e.g., lightning) was of interest to Benjamin Franklin
in the 1700s, with the invention of the lightning rod. The lightning rod was mankind’s first
effort to guide the electrical Discharge current of a lightning strike in a direction that would
not harm structures.
In the seven years since the first edition of this book was completed, Electrostatic
Discharge (ESD) phenomena in integrated circuits (IC) continues to be important
as technologies shrink and the speed and size of the chips increases. The phenom-
ena related to ESD events in semiconductor devices take place outside the realm of
normal device operation. Hence, the physics governing this behavior are not typ-
ically found in general textbooks on semiconductors.
Electrostatic Discharge (ESD) events can have serious detrimental
effects on the manufacture and performance of microelectronic devices,
the systems that contain them, and the manufacturing facilities used to
produce them. Submicron device technologies, high system operating
speeds, and factory automation are making ESD control programs a
critical factor in the quality and reliability of ESD-sensitive products.
The goal of this book is to introduce the simulation methods necessary to describe
the behaviour of semiconductor devices during an electrostatic Discharge (ESD).
The challenge of this task is the correct description of semiconductor devices under
very high current density and high temperature transients. As it stands, the book
can be no more than a snapshot and a summary of the research in this field
during the past few years. The authors hope that the book will provide the basis
for further development of simulation methods at this current frontier of device
physics.
The challenges associated with the design and implementation of Electro-
static Discharge (ESD) protection circuits become increasingly complex as
technology is scaled well into nano-metric regime. One must understand the
behavior of semiconductor devices under very high current densities, high
temperature transients in order to surmount the nano-meter ESD challenge.
As a consequence, the quest for suitable ESD solution in a given technology
must start from the device level. Traditional approaches of ESD design may
not be adequate as the ESD damages occur at successively lower voltages in
nano-metric dimensions.
This book on electrostatic Discharge phenomena is essentially a translation and
update ofa Swedish edition from 1992.
The book is intended for people working with electronic circuits and
equipments, in application and development. All personnel should be aware of the
ESD-hazards, especially those responsible for quality. ESD-prevention is a part of
TQM (Total Quality Management). The book is also usable for courses on the
subject.
Since electronic equipment was first developed, static electricity has been a
source of problems for users and designers. In the last few years, however,
electrostatic Discharge (ESD) has become a source of major problems. This
has occurred because newer electronic devices, such as integrated circuits,
are much more susceptible to ESD problems than previous devices, such as
vacuum tubes. Another trend compounding this ESD susceptibility problem
is the spread of sophisticated equipment into home and office environments
where ESD is quite common.
This text, ESD Basics: From Semiconductor Manufacturing to Product Use was initiated on
the need to produce a text that addresses fundamentals of electrostatic Discharge from the
manufacturing environment to today’s products. As the manufacturing world evolves, semi-
conductor networks scale, and systems are changing, the needs and requirements for reliabi-
lity and ESD protection are changing. A text is required that connects basic ESD phenomena
to today’s real world environment.
In the field of electricity, electrostatics, and circuit theory, there are many discoveries and
accomplishments that have lead to the foundation of the field of electrostatic Discharge
(ESD) phenomenon. Below is a chronological list of key events that moved the field of
electrostatics forward:
