MPU-6500是全球首例9軸運動處理傳感器。它集成了3軸mems陀螺儀，3軸mems加速度計，
上傳時間： 2019-12-07
上傳用戶：finezwl
As a student I did my best to avoid text books – a strange statement for a Professor to make and one that I should clarify before you put this book down; I did my best to avoid text books that did not help me.
標簽： Microdevices Ceramic Thick Films mems for and
上傳時間： 2020-06-06
上傳用戶：shancjb
The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology in MicroElectroMechanical Systems (mems) fabrication, particularly polysilicon surface micromachining. CMP not only eases the design and manufacturability of mems devices by eliminating several photolithographic and film issues generated by severe topography, but also enables far greater flexibility with process complexity and associated designs. T
標簽： mechanical polishing Chemical
上傳時間： 2020-06-06
上傳用戶：shancjb
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement mems devices. On the other hand, the mems devices could also add values to the IC industry as the Moore’s law reaching its limit. The CMOS mems could play a key role to bridge the gap between the CMOS and mems technologies. The CMOS mems also offers the advantage of monolithic integration of ICs and micro mechanical components.
標簽： TECHNOLOGY CMOS mems KEY
上傳時間： 2020-06-06
上傳用戶：shancjb
Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headlined by an array of exciting consumer and industrial products such as the Nintendo Wii, Apple iPod/iPad, sensor-rich smart phones, phones with cameras,new operating systems for mobile phones and apps,e-books,WiFi,voice- over-IP calls, social networking, 3D animated movies, and cloud computing, to name the major ones that affect everyday living
標簽： Foundations mems of
上傳時間： 2020-06-06
上傳用戶：shancjb
Nowadays sensors are part of everyday life in a wide variety of fields: scientific applications, medical instrumentation, industrial field, ...and, last but not least, popular mass production and low-cost goods, like smartphones and other mobile devices. Markets and business behind the field of sensors are quite impressive. A common trend for consumer applications is miniaturization which requires, on one side, a lot of research, development efforts, and resources but, on the other hand, allows costs and final application size reduction. In this scenario scientific community and industries are very active to drive innovation.
標簽： Magnetometers Lorentz Force mems
上傳時間： 2020-06-06
上傳用戶：shancjb
傳統集成電路，封裝的成本相對較低；但是在某些器件中，封裝成本已接近器件成本的1/2；在mems/微系統中，封裝可能比芯片制造更加困難，成本可能上升為70%～90%；封裝已經成為新器件商業化的瓶頸
標簽： 半導體封裝
上傳時間： 2022-01-13
上傳用戶：
SCB10H series pressure elements are high performance absolute pressure sensors. The sensors are based on Murata's proven capacitive 3D-mems technology. They enable exceptional possibility for OEM customers to integrate pressure measurement function in an optimal way into their products. SCB10H series elements can be designed to match the application specific pressure range. It is a bare capacitive sensor element that enables optimized application specific package and electronics design.
標簽： 傳感器
上傳時間： 2022-03-03
上傳用戶：
隨著科學水平的提高，生物、化學以及醫療相關器械領域對精度要求也在不斷地提升.生物制劑提取、注射，化學藥品傳輸供給以及藥物治療等mems的研究不單單是對精密儀器的攻堅克難，更是交叉學科賦予高精密儀器研究發展的難題。技術革新便要理論創新，才能突破現有技術發展的瓶頸。現有的壓電超聲波霧化器理論發展已頗具成熟，產業化發展也甚是豐富，可是由于產品的不斷創新換代，同時也導致理論創新的不同步，致使許多創新產品缺少對應的系統理論支持。本文立足微泵型壓電超聲波霧化器的研究，提出了系統的霧化理論、結構仿真和霧化效果實驗研究。本文主要的研究內容和成果如下：在霧化理論分析方面，通過對霧化片金屬基片和錐孔的變形公式推導分析，建立了微泵型壓電超聲波霧化器霧化理論數學模型，并結合變形分析對其霧化機理進行了完整的闡述在有限元仿真分析計算方面，通過對霧化片簡化建模，進行了霧化片的諾響應計算分析，得出霧化片諾響應工作模態及其相應振型。并結合霧化理論分析了各模態相應霧化效果，提出霧化效果改進意見。在霧化效果實驗方面，進行多普莉激光測振實驗，與諾響應仿真計算相互論證，提高其可行性，并通過霧化效果實驗來驗證霧化效果理論分析結果，最后結合仿真計算和多普勒激光測振結果綜合分析、總結出霧化效果的影響因素。關鍵詞：mems，壓電泵，超聲波，霧化器，壓電陶瓷，振型。本文工作在機械結構力學及控制國家重點實驗室完成。
標簽： 超聲波霧化器
上傳時間： 2022-06-18
上傳用戶：
博世BMI260六軸傳感器參考手冊，針對智能手機應用的新一代高性能mems慣性測量單元(IMU)。
上傳時間： 2022-06-27
上傳用戶：jason_vip1
