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MEMS?£????IMU?£?????¤?o???¨???o

  • kalman C程序

    kalman C程序,應用于GPS+IMU

    標簽: kalman C程序

    上傳時間: 2016-11-25

    上傳用戶:guanliya

  • 溫度傳感器

    本文設計一種基于表面微機械 MEMS加工工藝的微型傳感器,具有體積小,靈敏度高,穩(wěn)定性強等優(yōu)點。

    標簽: mems 溫度傳感器

    上傳時間: 2015-12-03

    上傳用戶:LC18

  • 面向微機電系統(tǒng)組裝與封裝的微操作裝備關鍵技術

    對微機電系統(tǒng)(Micro electro mechanical systems,MEMS)組裝與封裝工藝的特點進行了總結分析,給出了MEMS組裝與封裝設備的研究現(xiàn)狀。針對MEMS產(chǎn)業(yè)發(fā)展的特點,分析了面向MEMS組裝與封裝的微操作設備中的工藝參數(shù)優(yōu)化數(shù)據(jù)庫、快速精密定位、模塊化作業(yè)工具、快速顯微視覺、柔性裝夾和自動化物流等關鍵技術。在此基礎上,詳細介紹了研制的MEMS傳感器陽極化鍵合設備和引線鍵合設備的組成結構,工作原理,并給出了組裝和封裝試驗結果。最后,指出了MEMS組裝與封裝技術及設備研制的發(fā)展趨勢。

    標簽: 微機電系統(tǒng) 封裝 關鍵技術 操作

    上傳時間: 2016-07-26

    上傳用戶:leishenzhichui

  • UKF應用于GPS-IMU組合導航系統(tǒng)的MATLAB代碼

    無跡卡爾曼濾波UKF在組合導航中應用的MATLAB仿真代碼

    標簽: GPS-IMU MATLAB UKF

    上傳時間: 2017-12-29

    上傳用戶:007amw

  • MPU-6500規(guī)格書

    MPU-6500是全球首例9軸運動處理傳感器。它集成了3軸MEMS陀螺儀,3軸MEMS加速度計,

    標簽: 6500 MPU 規(guī)格書

    上傳時間: 2019-12-07

    上傳用戶:finezwl

  • Ceramic+Thick+Films+for+MEMS+and+Microdevices

    As a student I did my best to avoid text books – a strange statement for a Professor to make and one that I should clarify before you put this book down; I did my best to avoid text books that did not help me.

    標簽: Microdevices Ceramic Thick Films MEMS for and

    上傳時間: 2020-06-06

    上傳用戶:shancjb

  • Chemical mechanical polishing

    The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysilicon surface micromachining. CMP not only eases the design and manufacturability of MEMS devices by eliminating several photolithographic and film issues generated by severe topography, but also enables far greater flexibility with process complexity and associated designs. T

    標簽: mechanical polishing Chemical

    上傳時間: 2020-06-06

    上傳用戶:shancjb

  • CMOS MEMS_ A KEY TECHNOLOGY

    The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement MEMS devices. On the other hand, the MEMS devices could also add values to the IC industry as the Moore’s law reaching its limit. The CMOS MEMS could play a key role to bridge the gap between the CMOS and MEMS technologies. The CMOS MEMS also offers the advantage of monolithic integration of ICs and micro mechanical components. 

    標簽: TECHNOLOGY CMOS MEMS KEY

    上傳時間: 2020-06-06

    上傳用戶:shancjb

  • Foundations of MEMS

    Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headlined by an array of exciting consumer and industrial products such as the Nintendo Wii, Apple iPod/iPad, sensor-rich smart phones, phones with cameras,new operating systems for mobile phones and apps,e-books,WiFi,voice- over-IP calls, social networking, 3D animated movies, and cloud computing, to name the major ones that affect everyday living

    標簽: Foundations MEMS of

    上傳時間: 2020-06-06

    上傳用戶:shancjb

  • MEMS+Lorentz+Force+Magnetometers

    Nowadays sensors are part of everyday life in a wide variety of fields: scientific applications, medical instrumentation, industrial field, ...and, last but not least, popular mass production and low-cost goods, like smartphones and other mobile devices. Markets and business behind the field of sensors are quite impressive. A common trend for consumer applications is miniaturization which requires, on one side, a lot of research, development efforts, and resources but, on the other hand, allows costs and final application size reduction. In this scenario scientific community and industries are very active to drive innovation.

    標簽: Magnetometers Lorentz Force MEMS

    上傳時間: 2020-06-06

    上傳用戶:shancjb

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